Kazuki Senga

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM

△ [14p-A305-5] Reduction of metal/n-Ge contact resistivity by epitaxial HfGe₂ formation

〇Kazuki Senga¹, Shigehisa Shibayama¹, Osamu Nakatsuka^1,2 (1.Grad. Sch. of Eng., Nagoya Univ., 2.IMaSS, Nagoya Univ.)