5:15 PM - 5:30 PM
△ [14p-B401-14] Influence of PDA ambient gas on characteristics of n-β-Ga2O3/Al2O3/Pt MOS capacitors
〇(M1)Masafumi Hirose1,2, Toshihide Nabatame2, Erika Maeda1,2, Akihiko Ohi2, Naoki Ikeda2, Yoshihiro Irokowa2, Yasuo Koide2, Hajime Kiyono1 (1.SIT, 2.NIMS)