Yukiko Suzuki

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:30 PM - 6:15 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[14p-B401-1~17] 13.7 Compound and power electron devices and process technology

5:45 PM - 6:00 PM

△ [14p-B401-16] Reduction of contact resistance of ALD-Al₂O₃ diamond MOSFETs by selective regrowth high concentration boron doped layer;Drain current density | I_DS | > 1 A/mm

〇(B)Yukiko Suzuki¹, Shoichiro Imanishi¹, Ken Kudara¹, Kiyotaka Horikawa¹, Shotaro Amano¹, Masayuki Iwataki¹, Aoi Morishita¹, Atsushi Hiraiwa¹, Hiroshi Kawarada^1,2 (1.Waseda Univ., 2.Zaiken.)