Takashi Ishida

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:30 PM - 6:15 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[14p-B401-1~17] 13.7 Compound and power electron devices and process technology

2:00 PM - 2:15 PM

[14p-B401-3] Study on sputtered n+GaN for fabricating source regions of trench MOSFETs

〇Takashi Ishida^1,2,3, Tetsuya Shinozaki⁴, Masanori Shirai⁴, Satoru Takasawa⁴, Jun Suda^1,3, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.Toyota Motor Corp., 3.Nagoya Univ., 4.ULVAC)

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