Kiwamu Takehisa

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:30 PM - 5:20 PM D305 (11-305)

Symposium (Oral)
| Symposium
| Progresses and future on EUV and soft x-ray imaging techniques

[14p-D305-1~8] Progresses and future on EUV and soft x-ray imaging techniques

3:35 PM - 4:05 PM

[14p-D305-5] 1200X review function of EUV mask blank inspection systems

〇Kiwamu Takehisa¹, Tomohiro Suzuki¹, Hiroki Miyai¹, Haruhiko Kusunose¹ (1.Lasertec Corporation)