Nobukazu Teranishi

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:30 PM - 5:20 PM D305 (11-305)

Symposium (Oral)
| Symposium
| Progresses and future on EUV and soft x-ray imaging techniques

[14p-D305-1~8] Progresses and future on EUV and soft x-ray imaging techniques

4:35 PM - 5:05 PM

[14p-D305-7] CMOS Image Sensor Development for Soft X-ray and EUV Application

〇Nobukazu Teranishi^1,2, Tetsuo Harada¹, Takeo Watanabe¹, Quan Zhou³, Masatoshi Kimura³, Jan Bogaerts³, Xinyang Wang³ (1.LASTi, U. of Hyogo, 2.RIE, Shizuoka Univ., 3.Gpixel Inc.)

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