Yuki Takahashi

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:30 PM - 3:30 PM PB3 (PB)

Poster presentation
| 3 Optics and Photonics
| 3.15 Silicon photonics and integrated photonics

[14p-PB3-1~8] 3.15 Silicon photonics and integrated photonics

1:30 PM - 3:30 PM

[14p-PB3-8] High-Q Silicon Nanocavities fabricated with binary mask and halftone mask

〇(B)Yuki Takahashi¹, Takamasa Yasuda¹, Makoto Okano², Minoru Ohtsuka², Miyoshi Seki², Nobuyuki Yokoyama², Yasushi Takahashi¹ (1.Osaka Prefecture Univ., 2.AIST)

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