Kiichi Sato

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:00 AM - 11:30 AM A201 (6-201)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-A201-1~8] 15.6 Group IV Compound Semiconductors (SiC)

11:00 AM - 11:15 AM

[15a-A201-7] Non-destructive Measurement of Electrical Properties of Ion Implanted 4H-SiC Wafer with 3 Layers

〇Kiichi Sato¹, Takashi Fujii^1,3, Tsutomu Araki¹, Shinichiro Mouri¹, Koutaro Ishiji², Toshiyuki Iwamoto³, Ryuichi Sugie⁴ (1.Ritsumeikan Univ., 2.Kyushu Synchrotron Light Research Center, 3.PNP, 4.TRC)

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