Takafumi Toya

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 10:30 AM - 12:00 PM D221 (11-221)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15a-D221-1~6] 6.2 Carbon-based thin films

10:30 AM - 10:45 AM

△ [15a-D221-1] Film Properties of Fluorocarbon Films Prepared by RF-UBMS Method with PTFE Target

〇Takafumi Toya¹, Toru Harigai¹, Koki Tamekuni¹, Hirofumi Takikawa¹, Masao Kamiya² (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind. Co., Ltd.)