Shigeaki Kishida

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:30 AM - 11:30 AM

[15a-PA5-21] Inductively coupled plasma sputtering system of oxide semiconductors for large area deposition

〇Shigeaki Kishida¹, Daisuke Matsuo¹, Takuya Ikeda¹, Yoshitaka Setoguchi¹, Yasunori Andoh¹ (1.Nissin Electric)