09:30 〜 11:30 ▲ [15a-PB1-1] Deposition Condition for High Crystalline Fraction of Yttria-Stabilized Zirconia (YSZ) Films Deposited by Reactive Sputtering at Room Temperature 〇(M2)Jyotish Patidar1、Susumu Horita1 (1.JAIST)