9:30 AM - 11:30 AM
[15a-PB1-6] Crystallized ZnO Thin Film Fabrication by using Room Temperature ALD and its Application
〇(DC)Kazuki Yoshida1, Kentaro Saito1, Masanori Miura2, Kensaku Kanomata2, Fumihiko Hirose1 (1.Yamagata Univ., 2.ROEL Yamagata Univ.)