Yuta Kimura

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[15a-PB2-1~22] 8 Plasma Electronics

9:30 AM - 11:30 AM

[15a-PB2-17] Numerical Analysis of Incident Ion and Radical Fluxes onto Substrate in Dual-Frequency Low-Pressure Ar/CH₄ Plasma

〇(M1C)Yuta Kimura¹, Shin Ogawa¹, Masahiro Kojima¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³ (1.Chiba Inst. of Tech., 2.Meijo University, 3.Gifu University)