Naohiko Maeda

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[15a-PB2-1~22] 8 Plasma Electronics

9:30 AM - 11:30 AM

[15a-PB2-18] Control of plasma potential in dual cathode high power pulsed magnetron sputtering

〇Naohiko Maeda¹, Nana Fujii¹, Md. Suruz Mian¹, Takeo Nakano¹ (1.Seikei Univ.)