Yuki Nakagomi

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[15a-PB2-1~22] 8 Plasma Electronics

9:30 AM - 11:30 AM

[15a-PB2-2] Development of a component analysis method for modulated pulsed power magnetron sputtering by use of a reflectron time-of-flight mass spectrometer

〇Yuki Nakagomi¹, Mutsuki Hirayama¹, Tatsuya Watabe¹, Ryosuke Kaneyuki¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechinic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

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