Takayoshi Tsutsumi

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[15a-PB2-1~22] 8 Plasma Electronics

9:30 AM - 11:30 AM

[15a-PB2-21] Analysis of Temporal Variation in Wafer Temperature Distribution during Plasma Etching Processing

〇Takayoshi Tsutsumi¹, Kenji Ishikawa¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ.)