Asaki Kameda

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics(Poster)

[15a-PB2-1~22] 8 Plasma Electronics

9:30 AM - 11:30 AM

[15a-PB2-22] Precise measurement of the temperature of a silicon wafer by an optical-interference contactless thermometer during rapid plasma processing

〇(M2)Asaki Kameda¹, Yuri Mizukawa¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.ADSM, Hiroshima Univ.)