Ryousuke Nakatsura

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:00 PM - 2:15 PM

[15p-A305-2] Simulation for the Crystallization of a-Si Film on PC Substrate using Lumped-shots ELA

〇(M1)Ryousuke Nakatsura¹, Daaisuke Tokieda¹, Genta Sakamoto¹, Tatsuya Okada¹, Takashi Noguchi¹ (1.Ryukyu Univ.)