Tomotaka Hirano

→ Search for Tomotaka Hirano in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:15 PM - 4:30 PM

△ [15p-A305-9] Development of Local Transfer Process of Single-Crystalline Silicon Thin Films on Plastic Substrate

〇Tomotaka Hirano¹, Ryuji Kawakita¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)