Masanori Koyama

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:45 PM D215 (11-215)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

2:30 PM - 2:45 PM

[15p-D215-4] Stochastic simulation of pattern formation for chemically amplified resist in extreme ultraviolet lithography

〇(D)Masanori Koyama¹, Masamitsu Shirai¹, Hiroaki Kawata¹, Yoshihiko Hirai¹, Masaaki Yasuda¹ (1.Osaka Pref. Univ.)