Takumi Tominaga

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:15 PM - 4:45 PM D305 (11-305)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.6 Ultrasonics

[15p-D305-1~13] 1.6 Ultrasonics

2:15 PM - 2:30 PM

△ [15p-D305-5] Deterioration in the piezoelectric property of ScAlN thin film by negative ion bombardment increased in low-pressure sputtering deposition

〇Takumi Tominaga¹, Shinji Takayanagi¹, Takahiko Yanagitani² (1.Doshsha Univ., 2.Waseda Univ.)