The 67th JSAP Spring Meeting 2020

Tatsuya Okada

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Chairperson, etc.

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Akito Hara(Tohoku Gakuin Univ.), Tatsuya Okada(Univ. of the Ryukyus)