Akito Hara(Tohoku Gakuin Univ.), Tatsuya Okada(Univ. of the Ryukyus)
Akito Hara
Chairperson, etc.
Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology