The 67th JSAP Spring Meeting 2020

Kosuke Takenaka

→ Search for Kosuke Takenaka in Google Scholar

Chairperson, etc.

Fri. Mar 13, 2020 9:00 AM - 10:30 AM A205 (6-205)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[13a-A205-1~6] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Kosuke Takenaka(Osaka Univ.)