[15a-D221-1~6] 6.2 Carbon-based thin films

Sun. Mar 15, 2020 10:30 AM - 12:00 PM D221 (11-221)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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10:30 AM - 10:45 AM

△ [15a-D221-1] Film Properties of Fluorocarbon Films Prepared by RF-UBMS Method with PTFE Target

〇Takafumi Toya¹, Toru Harigai¹, Koki Tamekuni¹, Hirofumi Takikawa¹, Masao Kamiya² (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind. Co., Ltd.)

10:45 AM - 11:00 AM

△ [15a-D221-2] Preparation of DLC Films by Supplying Carbon Source Gas to Center of Pulse Arc Plasma Jet

〇Ryoya Tominaga¹, Toru Harigai¹, Hirofumi Takikawa¹, Shinsuke Kunitsugu², Satoru Kaneko³, Hidenobu Gonda⁴, Masao Kamiya⁵ (1.Toyohashi Univ. Technol., 2.Ind. Technol. Cent. Okayama, 3.Kanagawa Inst. Ind. Sci. Technol., 4.OSG Coating Service Co., Ltd., 5.Itoh Opt. Ind. Co., Ltd.)

11:00 AM - 11:15 AM

[15a-D221-3] Surface-Enhanced Raman Spectroscopy of a-C:H film after defect termination with hydrogen plasma treatment

〇Miyu Furuhashi¹, Takayuki Tokoroyama², Yasuyuki Ohashi², Hiroki Kondo³, Hiroyuki Kousaka⁴, Yuya Nakashima⁵, Tatsuya Furuki⁴, Kenji Ishikawa³, Masaru Hori³, Noritsugu Umehara² (1.Gifu Univ.Grad.Sch., 2.Nagoya Univ. Grad. Sch., 3.Nagoya Univ. cLPS, 4.Gifu Univ., 5.Fuji Electric)

11:15 AM - 11:30 AM

[15a-D221-4] Observation of sliding mark on DLC film surface using X-ray photoemission electron microscopy

Sota Norizuki¹, Sarayut Tunmee², Chanan Euaruksakun², Ukit Rittihong², Tomidokoro Masashi¹, Ratchadaporn Supruangnet², Yuki Hirata¹, Naoto Ohtake¹, 〇Hiroki Akasaka¹ (1.Tokyo Inst.of Tech., 2.SLRI)

11:30 AM - 11:45 AM

[15a-D221-5] Post-Annealing Effects on the Properties of Nitrogen-Doped DLC Films

〇Hiroya Osanai¹, Kazuki Nakamura¹, Haruto Koriyama¹, Yasuyuki Kobayashi¹, Yoshiharu Enta¹, Yushi Suzuki¹, Maki Suemitsu², Hideki Nakazawa¹ (1.Hirosaki Univ, 2.Tohoku Univ)

11:45 AM - 12:00 PM

△ [15a-D221-6] Synthesis of graphitic carbon nitride under low ammonia partial pressure

〇(B)Goichiro Seo¹, Inoki Hiroya¹, Kanai Kaname¹ (1.Tokyo Univ. of Sci.)

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