[12a-D511-1~10] 13.6 Nanostructures, quantum phenomena, and nano quantum devices

[12a-D511-9] Intermode coupling and giant enhancement in thermal responsivity in doubly clamped MEMS beam resonators

〇Ryoka Kondo¹, Kazuyuki Kuroyama¹, Boqi Qiu¹, Ya Zhang², Nomi Nagai¹, Kazuhiko Hirakawa¹ (1.IIS, Univ of Tokyo, 2.TUAT)

Keywords:MEMS resonator, THz detector, Mode coupling

Recently, we have proposed terahertz (THz) detectors using a photothermal effect in doubly clamped MEMS beam resonators. When THz electromagnetic wave is incident on the surface of the MEMS beam, the temperature of the beam slightly increases and induces a thermal expansion, resulting in a shift in the resonance frequency of the beam. By tracking the resonance frequency using a phase locked loop (PLL) circuit, this device has a high sensitivity and fast response speed at room temperature.
When the MEMS beam is driven with a large amplitude, intermode coupling effect occurs and the thermal responsivity increased about 50 times with special modulation frequency.
In this talk, we report that this modulation frequency depends on the frequency of each coupling modes and the coupling strength.