[12a-D519-1~9] 15.5 Group IV crystals and alloys

[12a-D519-6] Low-Temperature Solid-Phase Growth Characteristics of Thin-Film SiSn on Insulator

〇Tomohiro Kosugi¹, Yagi Kazuki², Sadoh Taizoh² (1.Kyushu Univ, 2.Kyushu Univ.)

Keywords:semiconductor, silicon tin

For enhancement of integrated circuit performance, it is important to employ new functional materials such as Si_xGe_1-x-ySn_y, because it has superior properties compared with Si. In the present study, low-temperature solid-phase growth characteristics of SiSn thin-films on insulator.