The 67th JSAP Spring Meeting 2020

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17 Nanocarbon Technology » 17 Nanocarbon Technology(Poster)

[12a-PA2-1~77] 17 Nanocarbon Technology

Thu. Mar 12, 2020 9:30 AM - 11:30 AM PA2 (PA)

9:30 AM - 11:30 AM

[12a-PA2-34] Pattern Etching of Si Substrates Assisted by Graphene Oxide

〇Hiroshi Shimakawa1, Wataru Kubota1, Toru Utsunomiya1, Takashi Ichii1, Hiroyuki Sugimura1 (1.Kyoto Univ.)

Keywords:graphene oxide, pattern, etching