[12a-PA2-1~77] 17 Nanocarbon Technology

[12a-PA2-62] Flattening of atomic-layer stacking structures

〇Akihiro Ueda¹, Takato Hotta¹, Keji Ueno², Kenji Watanabe³, Takashi Taniguchi³, Ryo Kitaura¹ (1.Nagoya Univ., 2.Saitama Univ., 3.NIMS)

Keywords:Atomic layer material, Stamp transfer

Atomic layer materials, which is a very thin material, have observe new physical properties derived from its thinness. However, it is easily affected by minute irregularities of the substrate surface and molecules attached to the surface, so it is difficult to observe the original properties. In order to solve this problem, attention has been paid to a method of sandwiching and protecting the atomic layer material from above and below with hBN, but there is a problem that impurities are sandwiched in the sandwiching process. In this research, we aimed to fabricate a flat atomic layer stack structure.