The 67th JSAP Spring Meeting 2020

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17 Nanocarbon Technology » 17 Nanocarbon Technology(Poster)

[12a-PA2-1~77] 17 Nanocarbon Technology

Thu. Mar 12, 2020 9:30 AM - 11:30 AM PA2 (PA)

9:30 AM - 11:30 AM

[12a-PA2-76] Transfer printing of gate dielectric and PVA doping for fabrication of top-gate MoS2 FET

〇Takamasa Kawanago1, Takahiro Matsuzaki1, Shunri Oda1 (1.Tokyo Tech. QNERC)

Keywords:MoS2 FET, top-gate architecture, doping