[12p-A201-1~8] 15.1 Bulk crystal growth

△ [12p-A201-6] Calculation and Control of Growth Rate in VB-β-Ga₂O₃ Crystal Growth

〇(M1)Yuta Matsuki¹, Tsuyoshi Kobayashi¹, Toshinori Taishi¹, Keigo Hoshikawa^1,2, Etsuko Ohba², Takumi Kobayashi² (1.Shinshu Univ., 2.Fujikoshi Machin. Co.)

Keywords:beta-Ga2O3, bulk crystal growth, numerical simulation

We succeeded in 2-inch β-Ga₂O₃ single crystal growth with newly developed VB furnace using Pt-Rh crucible in ambient air.As a result of unsteady calculation in the crystal growth, it was suggested that growth rate was slower than pulling down rate of crucible in initial stage of growth, and then gradually increased.