[12p-A201-1~8] 15.1 Bulk crystal growth

[12p-A201-8] The optimal control of SiC crystal growth in the RF-TSSG system using deep reinforcement learning

〇Yasunori Okano¹, Lei Wang¹, Yuto Takehara¹, Atsushi Sekimoto¹, Toru Ujihara² (1.Osaka Univ, 2.Nagoya Univ)

Keywords:Numerical simulation, SiC, TSSG method

In the crystal growth of SiC by RF-TSSG, a combination of computational fluid dynamics (CFD) and deep reinforcement learning (DRL) was introduced for obtaining the optimal melt flow pattern.