The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[12p-A403-1~15] 16.3 Bulk, thin-film and other silicon-based solar cells

Thu. Mar 12, 2020 1:15 PM - 5:30 PM A403 (6-403)

Keisuke Ohdaira(JAIST), Daiji Kanematsu(Panasonic), Shinsuke Miyajima(Tokyo Tech)

3:15 PM - 3:30 PM

[12p-A403-8] Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition

Shinsuke Miyagawa1, Kazuhiro Gotoh1, Markus Wilde2, Shohei Ogura2, Yasuyoshi Kurokawa1, Katsuyuki Fukutani2, Noritaka Usami1 (1.Graduate School of Eng., Nagoya Univ., 2.Institute of Industrial Sci., The Univ. of Tokyo)

Keywords:titanium oxide, passivation, hydrogen plasma treatment