[12p-D519-1~10] 15.5 Group IV crystals and alloys

△ [12p-D519-3] Depth-resolved tomographic analysis of high-Ge-content SiGe/compositionally graded SiGe/Si stacked structure using nanobeam X-ray diffraction

〇Kazuki Shida¹, Tetsuya Tohei¹, Yusuke Hayashi¹, Kazushi Sumitani², Yasuhiko Imai², Shigeru Kimura², Akira Sakai¹ (1.Grad. Sch. Eng. Sci., Osaka Univ., 2.JASRI)

Keywords:SiGe, compositionally graded layer, nanobeam X-ray diffraction