[12p-PA1-1~18] 3.9 テラヘルツ全般

[12p-PA1-11] 高感度・高温度安定性MEMSボロメータ

〇(B)吉岡 佑理¹、張 亜¹、関 遼太¹、鮫島 俊之¹、邱 博奇²、牛 天野²、平川 一彦^2,3 (1.農工大工、2.東大生研、3.東大ナノ量子機構)

キーワード：テラヘルツ、ボロメータ、温度安定性

In this work, we reported an uncooled sensitive MEMS bolometer with a high temperature stability. The MEMS bolometer senses the temperature change by measuring a shift in the mechanical resonance frequency caused by the thermal stress in the MEMS beam, and can detect a temperature change as small as ~1 μK even at room temperature. Meanwhile, since the environmental temperature fluctuation only gives an overall thermal expansion of the device, which does not contribute to the thermal stress in the beam, thus does not change the resonance frequency much. The frequency shift caused by local temperature rise of the beam is much larger than that caused by environmental temperature rise. The deposition of a stress-compensation layer will furthermore improve the thermal stability without significantly degrading its thermal sensitivity.