9:45 AM - 10:00 AM
[13a-A205-4] Low-temperature Formation of High-Mobility IGZO Thin Film Transistors using Reactive Plasma Processes(II)
Keywords:Reactive Plasma Processes, Oxide semiconductor
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Mar 13, 2020 9:00 AM - 10:30 AM A205 (6-205)
Kosuke Takenaka(Osaka Univ.)
9:45 AM - 10:00 AM
Keywords:Reactive Plasma Processes, Oxide semiconductor