[13a-PA2-1~10] 6.1 Ferroelectric thin films

[13a-PA2-4] Fabrication and Characterization of Li-ion Conductive Solid Electrolyte Thin Films by Sputtering Method

〇(B)Kenshin Narisawa¹, Uchiyama Kiyoshi¹ (1.NITTC)

Keywords:solid electrolyte, Li-ion, thin film

In this study, we focused on perovskite-type oxides which has excellent stability in the atmosphere. Recently, in the fabrication of Li based oxide thin films using SrTiO₃ (STO) substrates which has perovskite structure, there was a report that Li diffuses in STO substrates during the deposition. In response to this report, we thought that Li can easily conduct in STO. We actually fabricated Li-doped STO thin films, and evaluated the effect of Li doping on the conductivity.