[13a-PB2-1~7] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[13a-PB2-4] Force Sensitivity of new RuO₂ Vanadate Semiconducting Glass Matrix Composite

〇Yasuyoshi Saito¹, Asai Mitsuru¹, Wada Kensuke¹ (1.Toyota Central R&D Labs., Inc.)

Keywords:glass composite, force sensor

We have reported a force sensor sensitivity of RuO₂-particle dispersed insulating Pb-glass matrix composite (GMC), because it has advantage of low production cost due to low sintering temperature than that of Si crystal-base sensor. However, the material contains Pb element, it strongly demands to realize Pb-free GMC force sensor to meet the future no-Pb regulation. In the presentation, we report lead-free Vanadate glass material has force sensor sensitivity of -0.7%/100MPa, and RuO₂ particle dispersed Vanadate GMC has about two times larger force sensitivity of -1.32%/100MPa than that of Vanadate glass material.