[13p-D411-1~16] 6.3 Oxide electronics

△ [13p-D411-11] Fabrication and transport properties of SrWO_3-xN_x thin films

〇Takahiro Maruyama¹, Akira Chikamatsu¹, Yasushi Hirose¹, Tukasa Katayama¹, Tetsuya Hasegawa¹ (1.Univ. of Tokyo)

Keywords:oxynitride, thin film, transport properties

A transition metal oxynitride exhibits various electron transport properties. For example, amorphous ZnO_xN_y having high electron mobility and EuNbO₂N shows a huge negative magnetoresistance. Most oxynitrides show semiconducting properties in stoichiometric composition. SrWO₂N has been reported as one of the few examples showing metallic conduction. In this study, we fabricated SrWO_3-xN_x single crystal thin films and investigated their electron transport properties.