2:45 PM - 3:00 PM
[13p-D419-4] Epitaxial growth of γ-(AlxGa1-x)2O3 alloy thin films by mist chemical vapor deposition
Keywords:wide-bandgap semiconductor, Gallium Oxide, mist CVD
Oral presentation
Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Fri. Mar 13, 2020 1:45 PM - 6:15 PM D419 (11-419)
Takashi Yasuda(Ishinomaki Senshu Univ.), Takumi Ikenoue(Kyoto Univ.)
2:45 PM - 3:00 PM
Keywords:wide-bandgap semiconductor, Gallium Oxide, mist CVD