[13p-PA8-1~20] 6.2 Carbon-based thin films

[13p-PA8-9] Structures and Organic Gas-Sorption Characteristics of the Carbonaceous Films Prepared by RF-Sputtering of Porous Sintered-Polymers

〇Tsukasa Iizuka¹, Yoriko Suda¹, Iwao Sugimoto¹, Kazuhiko Takahashi² (1.Tokyo University of Technology, School of Computer Science, 2.Doshisha University)

Keywords:Sputtering, Gas-sorption, Carbonaceous film