[13p-PA8-1~20] 6.2 Carbon-based thin films

[13p-PA8-10] Investigation of Thermal Expansion Coefficients of Amorphous Carbon and Amorphous Carbon Nitride Thin Films Prepared through Sputtering

〇Masami Aono¹, Hisashi Miyazaki², Takaaki Kasuga³, Masaya Nogi³ (1.Kagoshima Univ., 2.NDA, 3.Osaka Univ.)

Keywords:Amorphous carbon, Carbon nitride, Thermal Expansion Coefficients