[14a-B508-1~11] 7.1 X-ray technologies

[14a-B508-2] Design of high diffraction efficiency and high resolution soft X-ray laminar type multilayer gratings for 2-4 keV region

〇Masato Koike^1,2, Yoshihiro Ueno³, Tadashi Hatano⁴, Pirozhkov Alexander¹, Masami Terauchi⁴ (1.QuBS, QST, 2.Dept. of Eng., Osaka City Univ., 3.Tech. Res. Lab., Shimadzu Corp., 4.IMRAM, Tohoku Univ.)

Keywords:diffraction grating, soft X-ray, multilayer

For soft X-ray diffraction gratings in the keV region, we estimated the highest possible performance when using the technologies of fabricating grating grooves and multilayer coating up to the technical limit currently available by numerical calculations. At this this time, as a starting point, a W / C multilayer grating with a so-called supermirror structure widely used in the hard X-ray region was designed and investigated assuming a laminar-type diffraction grating with a groove density of 3200 grooves / mm and groove depth of 2 nm. We report the expected performance of a diffraction grating showing high diffraction efficiency and high resolution in a region of 2~ 4 keV.