The 67th JSAP Spring Meeting 2020

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Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[14a-D305-1~10] 7.5 Ion beams

Sat. Mar 14, 2020 9:15 AM - 12:00 PM D305 (11-305)

Yasuhito Gotoh(Kyoto Univ.), Satoshi Ninomiya(Univ. of Yamanashi)

11:45 AM - 12:00 PM

[14a-D305-10] Surface modification and etching of MoS2 with GCIB irradiation (II)

〇(M1)Masayuki Kenmotsu1, Noriaki Toyoda1 (1.Univ. Hyogo)

Keywords:gas culster ion beam, molybdenum sulfide