The 67th JSAP Spring Meeting 2020

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[14a-D305-1~10] 7.5 Ion beams

Sat. Mar 14, 2020 9:15 AM - 12:00 PM D305 (11-305)

Yasuhito Gotoh(Kyoto Univ.), Satoshi Ninomiya(Univ. of Yamanashi)

11:30 AM - 11:45 AM

△ [14a-D305-9] Atomic Layer Etching of Ni by GCIB irradiation on hfac adsorbed surface

〇(M1)Kota Uematsu1, Noriaki Toyoda1 (1.Univ. of Hyogo)

Keywords:Gas cluster ion beam, Atomic layer etching