The 67th JSAP Spring Meeting 2020

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[14a-D305-1~10] 7.5 Ion beams

Sat. Mar 14, 2020 9:15 AM - 12:00 PM D305 (11-305)

Yasuhito Gotoh(Kyoto Univ.), Satoshi Ninomiya(Univ. of Yamanashi)

9:45 AM - 10:00 AM

[14a-D305-3] Simulation of secondary ion trajectory in MeV-SIMS under atmospheric pressure

〇Toshio Seki1, Takaaki Aoki2, Jiro Matsuo1 (1.Grad. Sch. of Eng., Kyoto Univ., 2.ACCMS, Kyoto Univ.)

Keywords:ambient SIMS, MeV ion