[14a-D411-1~7] 6.5 Surface Physics, Vacuum

△ [14a-D411-3] Surface structure analysis of micropatterned crystalline Si by nano-beam Reflection High-Energy Electron Diffraction

〇(M1)Sohei Nakatsuka¹, Taishi Imaizumi¹, Tadashi Abukawa¹, Azusa N. Hattori², Hidekazu Tanaka², Aydar Irmikimov³, Ken Hattori³ (1.IMRAM, Tohoku Univ., 2.ISIR, Osaka Univ., 3.NAIST)

Keywords:RHEED, microstructure, Si

By about 100 times flashes, ~1260℃ electrical resistance heating by us, the shapes of rectangular ridges on the Si(110) substrate were changed into rounded shapes. We observed the surface of the ridges by the technique combining the scanning electron microscope and nano-beam Reflection High-Energy Electron Diffraction which we have developed to analyze the surface structure of such micro- or nano- areas. Several characteristic diffraction patterns were observed which imply the surface of the ridge changed to the structure surrounded by multiple crystalline planes. In addition, in order to obtain dark field images, we improved our experimental apparatus to observe spot intensities of the diffraction patterns, and we realized the visualization of each crystalline plane area.