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△ [14a-D419-6] Effect of deposition condition on the ferroelectric properties of (Al1-xScx)N thin films.
Keywords:ferroelectric, thin film, nitride
(Al1-xScx)N, which is a solid solution of Sc of Group Ⅲ element in AlN, was reported to have ferroelectricity in 2019. Its properties are good and are attracting attention. In this study, an ultra-thin film of (Al1-xScx)N was prepared by a dual source reactive RF magnetron sputtering. Deposition films were evaluated for crystal structure and ferroelectric properties.