[14a-PA1-1~32] 1.2 Education

[14a-PA1-22] Nanotech Platform Established for Average Technical Education Science Laboratories

〇Shiro Nagaoka¹, Masashi Yamamoto¹, Tomokazu Shikama¹, Tomo Shimizu¹, Robert Johonston¹, Kazunori Matsuda², Fusao Shimokawa³, Hideo Horibe⁴ (1.NIT, Kagawa College, 2.Tokushima Bunri Univ., 3.Kagawa Univ., 4.Osaka City Univ.)

Keywords:semiconductor, device, fabrication process

Actual device fabrication experience is important for the students to get the deep understanding. Nanotechnology platform established at the average science laboratory which makes the design, fabrication and evaluation possible is crucial circumstance to achieve such purpose. Thermal diffusions of Phosphorous and Boron, thermal oxidization of the surface of the silicon substrate and sintering of the silver contained material for the electrode prepared under normal air environment, in addition, simplification of the photolithography process were studied and successfully demonstrated to make p-n junction which is the basic device to design various kinds of semiconductor devices. In addition, simple evaluation apparatus consisting of average PC and the analog & digital circuit design kit for the device evaluation also proposed and successfully demonstrated. It was confirmed that these results can contribute to establish the nanotechnology platform at the average science laboratory.