[14a-PB4-1~15] 3.7 Laser processing

[14a-PB4-8] LIPSS formation by circularly polarized laser pulses on GaN substrate

〇Hidenori Matsuura¹, Reina Miyagawa¹, Osamu Eryu¹ (1.NITech)

Keywords:GaN, LIPSS

Laser-Induced Periodic Surface Structure (LIPSS) is a nano-order periodic structure formed on the substrate surface by laser irradiation. LIPSS causes less damage to the substrate than other microfabrication methods and does not require complicated wet processes. It is known that the shape of LIPSS changes due to laser polarization, but there are few detailed reports on circular polarization. In this study, we investigated the formation of LIPSS by irradiating circularly polarized laser on GaN, which is useful for optical and electronic device applications.